B/Si multilayers for soft X-ray and extreme ultraviolet optics

Marie-Françoise Ravet 1 Françoise Bridou 1 A. Raynal 1 Bruno Pardo 1 Jean-Pierre Chauvineau 1 Jean-Michel André 2
1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
2 LCPMR - Laboratoire de Chimie Physique - Matière et Rayonnement
Abstract : With the development of x-ray sources, high reflectivity and selectivity multilayers for optics are becoming a field of interest for the spectral region of 13-40 nm. In this article, it is shown from theoretical computations that multilayers made of two light materials such as B/Si can be used for these applications. Such multilayers were deposited by electron evaporation. Their physical properties were studied by x-ray reflectometry analyses at two wavelengths: 0.154 and 12.6 nm. The results show that the multilayers are made of dense and pure materials and that the interfacial layer thickness ranges from 0.3 to 0.7 nm.
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Journal of Applied Physics, American Institute of Physics, 2001, 89 (2), pp.1145-1150. 〈10.1063/1.1322590#〉
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Marie-Françoise Ravet, Françoise Bridou, A. Raynal, Bruno Pardo, Jean-Pierre Chauvineau, et al.. B/Si multilayers for soft X-ray and extreme ultraviolet optics. Journal of Applied Physics, American Institute of Physics, 2001, 89 (2), pp.1145-1150. 〈10.1063/1.1322590#〉. 〈hal-00872668〉

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