Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers - Institut d'Optique Graduate School
Journal Articles Applied optics Year : 2024

Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers

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Physics [physics]
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Submitted on : Wednesday, December 20, 2023-1:41:12 PM

Last modification on : Wednesday, September 25, 2024-11:48:38 AM

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hal-04355822 , version 1 (20-12-2023)

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Amr Hisham K. Mahmoud, Sébastien de Rossi, Evgueni Meltchakov, Blandine Capitanio, Muriel Thomasset, et al.. Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers. Applied optics, 2024, 63 (1), pp.30. ⟨10.1364/AO.505546⟩. ⟨hal-04355822⟩

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IOGS CNRS ENS-CACHAN SPMS PARISTECH LCFIO MSSMAT LMT LCF_XUV CENTRALESUPELEC INC-CNRS UNIV-PARIS-SACLAY SYNCHROTRON-SOLEIL SORBONNE-UNIVERSITE SU-SCIENCES ENS-PARIS-SACLAY GS-CHIMIE GS-PHYSIQUE INSTITUT-SCIENCES-LUMIERE LMPS
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