Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers - Institut d'Optique Graduate School Access content directly
Journal Articles Applied optics Year : 2024

Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers

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hal-04355822 , version 1 (20-12-2023)

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Amr Hisham K. Mahmoud, Sébastien de Rossi, Evgueni Meltchakov, Blandine Capitanio, Muriel Thomasset, et al.. Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers. Applied optics, 2024, 63 (1), pp.30. ⟨10.1364/AO.505546⟩. ⟨hal-04355822⟩
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