Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers

Amr Hisham K. Mahmoud (1) , Sébastien de Rossi (1) , Evgueni Meltchakov (1) , Blandine Capitanio (2, 1) , Muriel Thomasset (2) , Maxime Vallet (3, 4) , Franck Delmotte (1)

1 Laboratoire Charles Fabry / Optique XUV
2 SSOLEIL - Synchrotron SOLEIL
3 SPMS - Laboratoire Structures, Propriétés et Modélisation des solides
4 LMPS - Laboratoire de Mécanique Paris-Saclay

Domaines: Physique [physics]

Amr Hisham K. Mahmoud, Sébastien de Rossi, Evgueni Meltchakov, Blandine Capitanio, Muriel Thomasset, et al.. Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers. Applied optics, 2024, 63 (1), pp.30. ⟨10.1364/AO.505546⟩. ⟨hal-04355822⟩