High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers - Institut d'Optique Graduate School
Journal Articles Optics Letters Year : 2020

High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

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Optics [physics.optics]
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Submitted on : Saturday, February 24, 2024-2:30:02 AM

Last modification on : Wednesday, March 13, 2024-6:24:17 PM

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hal-03350956 , version 1 (24-02-2024)

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Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, et al.. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. Optics Letters, 2020, 45 (4), pp.869-872. ⟨10.1364/OL.384734⟩. ⟨hal-03350956⟩

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IOGS CNRS PARISTECH LCFIO LCF_XUV UNIV-PARIS-SACLAY GS-ENGINEERING GS-PHYSIQUE INSTITUT-SCIENCES-LUMIERE
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