High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Jennifer Rebellato (1, 2) , Regina Soufli (3) , Evgueni Meltchakov (2) , Eric Gullikson (4) , Sébastien de Rossi (2) , Franck Delmotte (2)

1 CNES - Centre National d'Études Spatiales [Toulouse]
2 Laboratoire Charles Fabry / Optique XUV
3 LLNL - Lawrence Livermore National Laboratory
4 LBNL - Lawrence Berkeley National Laboratory [Berkeley]

Domaines: Optique [physics.optics]

Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, et al.. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. Optics Letters, 2020, 45 (4), pp.869-872. ⟨10.1364/OL.384734⟩. ⟨hal-03350956⟩