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Journal Articles Optics Letters Year : 2020

High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

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hal-03350956 , version 1 (24-02-2024)

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Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, et al.. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. Optics Letters, 2020, 45 (4), pp.869-872. ⟨10.1364/OL.384734⟩. ⟨hal-03350956⟩
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