High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers - Institut d'Optique Graduate School Access content directly
Journal Articles Optics Letters Year : 2020

High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

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Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-03350956

Submitted on : Tuesday, September 21, 2021-5:27:10 PM

Last modification on : Friday, September 22, 2023-2:37:21 PM

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hal-03350956 , version 1 (21-09-2021)

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Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, et al.. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. Optics Letters, 2020, 45 (4), pp.869-872. ⟨10.1364/OL.384734⟩. ⟨hal-03350956⟩

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IOGS CNRS PARISTECH LCFIO LCF_XUV UNIV-PARIS-SACLAY GS-ENGINEERING GS-PHYSIQUE
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