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High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

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https://hal-iogs.archives-ouvertes.fr/hal-03350956
Contributor : Marie-Laure Edwards Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 5:27:10 PM
Last modification on : Thursday, September 23, 2021 - 3:33:24 AM

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Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, et al.. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. Optics Letters, Optical Society of America - OSA Publishing, 2020, 45 (4), pp.869-872. ⟨10.1364/OL.384734⟩. ⟨hal-03350956⟩

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