HAL will be down for maintenance from Friday, June 10 at 4pm through Monday, June 13 at 9am. More information
Skip to Main content Skip to Navigation
Journal articles

High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Document type :
Journal articles
Complete list of metadata

https://hal-iogs.archives-ouvertes.fr/hal-03350956
Contributor : Marie-Laure Edwards Connect in order to contact the contributor
Submitted on : Tuesday, September 21, 2021 - 5:27:10 PM
Last modification on : Tuesday, January 4, 2022 - 6:04:57 AM

Links full text

Identifiers

Citation

Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, et al.. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. Optics Letters, Optical Society of America - OSA Publishing, 2020, 45 (4), pp.869-872. ⟨10.1364/OL.384734⟩. ⟨hal-03350956⟩

Share

Metrics

Record views

8