Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

M. Barysheva (1) , S. Garakhin (1) , S. Yu. Zuev (1) , V. Polkovnikov (1) , N. Salashchenko (1) , M. Svechnikov (1) , R. Smertin (1) , N. Chkhalo (1) , Evgueni Meltchakov (2)

1 Institute for Physics of Microstructures, Russian Academy of Sciences, 603095 Nizhny Novgorod, GSP-105, Russia
2 Laboratoire Charles Fabry / Optique XUV

Domaines: Optique [physics.optics]

M. Barysheva, S. Garakhin, S. Yu. Zuev, V. Polkovnikov, N. Salashchenko, et al.. Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range. Technical Physics / Zhurnal Tekhnicheskoi Fiziki, 2019, 64 (11), pp.1673-1679. ⟨10.1134/S1063784219110045⟩. ⟨hal-03345695⟩