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Journal articles
Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range
M. Barysheva
1
S. Garakhin
1
S. Yu. Zuev
1
V. Polkovnikov
1
N. Salashchenko
1
M. Svechnikov
1
R. Smertin
1
N. Chkhalo
1
E. Meltchakov
2
E. Meltchakov 2
Author
1
Institute for Physics of Microstructures, Russian Academy of Sciences, 603095 Nizhny Novgorod, GSP-105, Russia (Institute for Physics of Microstructures, Russian Academy of Sciences, 603095 Nizhny Novgorod, GSP-105, Russia - Russia)
2
Laboratoire Charles Fabry / Optique XUV (France)
- LCF - Laboratoire Charles Fabry (2 avenue Augustin Fresnel, 91127 Palaiseau Cedex - France)
- UP11 - Université Paris-Sud - Paris 11 (Bâtiment 300 - 91405 Orsay cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR8501 (France)
- IOGS - Institut d'Optique Graduate School (2 avenue Augustin Fresnel, 91127 Palaiseau Cedex - France)
Document type :
Journal articles
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https://hal-iogs.archives-ouvertes.fr/hal-03345695
Contributor : Marie-Laure Edwards Connect in order to contact the contributor
Submitted on : Wednesday, September 15, 2021 - 5:23:17 PM
Last modification on : Thursday, September 16, 2021 - 3:46:27 AM
Contributor : Marie-Laure Edwards Connect in order to contact the contributor
Submitted on : Wednesday, September 15, 2021 - 5:23:17 PM
Last modification on : Thursday, September 16, 2021 - 3:46:27 AM
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- HAL Id : hal-03345695, version 1
- DOI : 10.1134/S1063784219110045
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Citation
M. Barysheva, S. Garakhin, S. Yu. Zuev, V. Polkovnikov, N. Salashchenko, et al.. Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range. Technical Physics / Zhurnal Tekhnicheskoi Fiziki, MAIK Nauka/Interperiodica (МАИК Наука/Интерпериодика), 2019, 64 (11), pp.1673-1679. ⟨10.1134/S1063784219110045⟩. ⟨hal-03345695⟩
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