Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range - Archive ouverte HAL Access content directly
Journal Articles Technical Physics / Zhurnal Tekhnicheskoi Fiziki Year : 2019

Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

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hal-03345695 , version 1 (15-09-2021)

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M. Barysheva, S. Garakhin, S. Yu. Zuev, V. Polkovnikov, N. Salashchenko, et al.. Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range. Technical Physics / Zhurnal Tekhnicheskoi Fiziki, 2019, 64 (11), pp.1673-1679. ⟨10.1134/S1063784219110045⟩. ⟨hal-03345695⟩
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