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Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

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https://hal-iogs.archives-ouvertes.fr/hal-03345695
Contributor : Marie-Laure Edwards Connect in order to contact the contributor
Submitted on : Wednesday, September 15, 2021 - 5:23:17 PM
Last modification on : Thursday, September 16, 2021 - 3:46:27 AM

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M. Barysheva, S. Garakhin, S. Yu. Zuev, V. Polkovnikov, N. Salashchenko, et al.. Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range. Technical Physics / Zhurnal Tekhnicheskoi Fiziki, MAIK Nauka/Interperiodica (МАИК Наука/Интерпериодика), 2019, 64 (11), pp.1673-1679. ⟨10.1134/S1063784219110045⟩. ⟨hal-03345695⟩

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