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Journal Articles Technical Physics / Zhurnal Tekhnicheskoi Fiziki Year : 2019

Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

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Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-03345695

Submitted on : Wednesday, September 15, 2021-5:23:17 PM

Last modification on : Friday, September 22, 2023-2:49:01 PM

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hal-03345695 , version 1 (15-09-2021)

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M. Barysheva, S. Garakhin, S. Yu. Zuev, V. Polkovnikov, N. Salashchenko, et al.. Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range. Technical Physics / Zhurnal Tekhnicheskoi Fiziki, 2019, 64 (11), pp.1673-1679. ⟨10.1134/S1063784219110045⟩. ⟨hal-03345695⟩

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IOGS CNRS PARISTECH LCFIO LCF_XUV UNIV-PARIS-SACLAY GS-ENGINEERING GS-PHYSIQUE INSTITUT-SCIENCES-LUMIERE
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