Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

M. Barysheva; S. Garakhin; S. Yu. Zuev; V. Polkovnikov; N. Salashchenko; M. Svechnikov; R. Smertin; N. Chkhalo; E. Meltchakov

doi:10.1134/S1063784219110045

Journal articles

Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

M. Barysheva ¹ S. Garakhin ¹ S. Yu. Zuev ¹ V. Polkovnikov ¹ N. Salashchenko ¹ M. Svechnikov ¹ R. Smertin ¹ N. Chkhalo ¹ E. Meltchakov ²

1 Institute for Physics of Microstructures, Russian Academy of Sciences, 603095 Nizhny Novgorod, GSP-105, Russia

2 Laboratoire Charles Fabry / Optique XUV

LCF - Laboratoire Charles Fabry

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Journal articles

Domain :

Physics [physics] / Physics [physics] / Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-03345695
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Submitted on : Wednesday, September 15, 2021 - 5:23:17 PM
Last modification on : Saturday, June 25, 2022 - 10:52:36 PM

Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

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Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

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