Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion - Institut d'Optique Graduate School Access content directly
Journal Articles Applied optics Year : 1996

Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion

Abstract

A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed.
Fichier principal
Vignette du fichier
15_00954.pdf (347.65 Ko) Télécharger le fichier
Origin : Publisher files allowed on an open archive
Loading...

Dates and versions

hal-00877695 , version 1 (29-10-2013)

Identifiers

Cite

Sylvain Lazare, John Lopez, Jean-Marie Turlet, Maria Kufner, Stefan Kufner, et al.. Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion. Applied optics, 1996, 35 (22), pp.4471-4475. ⟨10.1364/AO.35.004471⟩. ⟨hal-00877695⟩
391 View
1331 Download

Altmetric

Share

Gmail Facebook X LinkedIn More