Skip to Main content Skip to Navigation
Journal articles

Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion

Sylvain Lazare 1 John Lopez 1 Jean-Marie Turlet 2 Maria Kufner 3 Stefan Kufner 3 Pierre Chavel 4
1 Laboratoire de Photochemie et Photophysique Moléculaire
2 CPMOH - Centre de physique moléculaire optique et hertzienne
3 TONA - Department of Applied Physics and Photonics [Brussels]
4 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
Abstract : A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed.
Document type :
Journal articles
Complete list of metadata

Cited literature [9 references]  Display  Hide  Download
https://hal-iogs.archives-ouvertes.fr/hal-00877695
Contributor : Fatima Pereira <>
Submitted on : Tuesday, October 29, 2013 - 10:01:29 AM
Last modification on : Tuesday, October 6, 2020 - 4:28:05 PM
Long-term archiving on: : Friday, April 7, 2017 - 5:39:52 PM

File

Vignette du document
15_00954.pdf
Publisher files allowed on an open archive

Identifiers

Collections

CNRS | IOGS | PARISTECH | LCFIO | LCF_SCOP | LOMA

Citation

Sylvain Lazare, John Lopez, Jean-Marie Turlet, Maria Kufner, Stefan Kufner, et al.. Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion. Applied optics, Optical Society of America, 1996, 35 (22), pp.4471-4475. ⟨10.1364/AO.35.004471⟩. ⟨hal-00877695⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

1176

Files downloads

1598