Optical, chemical, and depth characterization of Al/SiC periodic multilayers - Institut d'Optique Graduate School
Conference Papers Year : 2009

Optical, chemical, and depth characterization of Al/SiC periodic multilayers

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Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00661774

Submitted on : Friday, January 20, 2012-4:17:33 PM

Last modification on : Friday, April 19, 2024-4:18:54 PM

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hal-00661774 , version 1 (20-01-2012)

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Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Evgueni Meltchakov, et al.. Optical, chemical, and depth characterization of Al/SiC periodic multilayers. EUV and X-Ray Optics: Synergy between Laboratory and Space, Apr 2009, Prague, Czech Republic. pp.73600, ⟨10.1117/12.820913⟩. ⟨hal-00661774⟩

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IOGS UPMC ENSCP CNRS PARISTECH LCFIO LCF_SCOP LPCS LCPMR PSL UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE SU-SCIENCES CHIMIE-SU
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