Optical, chemical, and depth characterization of Al/SiC periodic multilayers - Institut d'Optique Graduate School Access content directly
Conference Papers Year : 2009

Optical, chemical, and depth characterization of Al/SiC periodic multilayers

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Optics [physics.optics]

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Submitted on : Friday, January 20, 2012-4:17:33 PM

Last modification on : Friday, June 2, 2023-3:14:37 PM

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hal-00661774 , version 1 (20-01-2012)

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Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Evgueni Meltchakov, et al.. Optical, chemical, and depth characterization of Al/SiC periodic multilayers. EUV and X-Ray Optics: Synergy between Laboratory and Space, Apr 2009, Prague, Czech Republic. pp.73600, ⟨10.1117/12.820913⟩. ⟨hal-00661774⟩

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