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Optical, chemical, and depth characterization of Al/SiC periodic multilayers

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https://hal-iogs.archives-ouvertes.fr/hal-00661774
Contributor : Sébastien de Rossi Connect in order to contact the contributor
Submitted on : Friday, January 20, 2012 - 4:17:33 PM
Last modification on : Sunday, June 26, 2022 - 11:55:19 AM

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Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Evgueni Meltchakov, et al.. Optical, chemical, and depth characterization of Al/SiC periodic multilayers. EUV and X-Ray Optics: Synergy between Laboratory and Space, Apr 2009, Prague, Czech Republic. pp.73600, ⟨10.1117/12.820913⟩. ⟨hal-00661774⟩

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