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Optical, chemical, and depth characterization of Al/SiC periodic multilayers

Philippe Jonnard 1 Karine Le Guen 1 Min-Hui Hu 1 Jean-Michel André 1 Evgueni Meltchakov 2 Christophe Hecquet 2 Franck Delmotte 2 Anouk Galtayries 3 
1 LCPMR - Laboratoire de Chimie Physique - Matière et Rayonnement
2 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
3 LPCS - Laboratoire de Physico-Chimie des Surfaces
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https://hal-iogs.archives-ouvertes.fr/hal-00661774
Contributor : Sébastien de Rossi Connect in order to contact the contributor
Submitted on : Friday, January 20, 2012 - 4:17:33 PM
Last modification on : Sunday, June 26, 2022 - 11:55:19 AM

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Citation

Philippe Jonnard, Karine Le Guen, Min-Hui Hu, Jean-Michel André, Evgueni Meltchakov, et al.. Optical, chemical, and depth characterization of Al/SiC periodic multilayers. EUV and X-Ray Optics: Synergy between Laboratory and Space, Apr 2009, Prague, Czech Republic. pp.73600, ⟨10.1117/12.820913⟩. ⟨hal-00661774⟩

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