Large area nanopatterning by combined Anodic Aluminum Oxide and soft UV-NIL technologies for applications in biology

Frédéric Hamouda (1) , Houda Sahaf (2) , Sylvain Held (1) , Grégory Barbillon (3) , Philippe Gogol (1) , Eric Moyen (2) , Abdelhanin Aassime (1) , Marie-Paule Planté , Julien Moreau (3) , Michael Canva (3) , Jean-Michel Lourtioz (1) , Margrit Hanbücken (2) , Bernard Bartenlian (1)

1 IEF - Institut d'électronique fondamentale
2 CINaM - Centre Interdisciplinaire de Nanoscience de Marseille
3 Laboratoire Charles Fabry de l'Institut d'Optique / Macsybio - bio

Domains: Optics [physics.optics]

Frédéric Hamouda, Houda Sahaf, Sylvain Held, Grégory Barbillon, Philippe Gogol, et al.. Large area nanopatterning by combined Anodic Aluminum Oxide and soft UV-NIL technologies for applications in biology. International Conference on Micro and Nano Engineering 10 (MNE10), Oct 2010, Genoa, Italy. ⟨hal-00629113⟩