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Large area nanopatterning by combined Anodic Aluminum Oxide and soft UV-NIL technologies for applications in biology

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Physics [physics] Physics [physics] Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00629113

Submitted on : Wednesday, October 5, 2011-9:57:19 AM

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hal-00629113 , version 1 (05-10-2011)

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  • HAL Id : hal-00629113 , version 1

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Frédéric Hamouda, Houda Sahaf, Sylvain Held, Grégory Barbillon, Philippe Gogol, et al.. Large area nanopatterning by combined Anodic Aluminum Oxide and soft UV-NIL technologies for applications in biology. International Conference on Micro and Nano Engineering 10 (MNE10), Oct 2010, Genoa, Italy. ⟨hal-00629113⟩

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