Anodic Aluminum Oxide Replication for Soft UV-NIL Substrate Nanopatterning: Application in Biophysics

Houda Sahaf (1) , Frédéric Hamouda (2) , Eric Moyen (1) , Grégory Barbillon (3) , Sylvain Held (2) , Philippe Gogol (2) , Abdelhanin Aassime (2) , Julien Moreau (3) , Michael Canva (3) , Jean-Michel Lourtioz (2) , Margrit Hanbücken (1) , Bernard Bartenlian (2)

1 CINaM - Centre Interdisciplinaire de Nanoscience de Marseille
2 IEF - Institut d'électronique fondamentale
3 Laboratoire Charles Fabry de l'Institut d'Optique / Macsybio - bio

Domains: Optics [physics.optics]

Houda Sahaf, Frédéric Hamouda, Eric Moyen, Grégory Barbillon, Sylvain Held, et al.. Anodic Aluminum Oxide Replication for Soft UV-NIL Substrate Nanopatterning: Application in Biophysics. 8th International Symposium on Atomic Level Characterizations for New Materials and Devices (ALC'11), May 2011, Séoul, South Korea. ⟨hal-00628176⟩