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Anodic Aluminum Oxide Replication for Soft UV-NIL Substrate Nanopatterning: Application in Biophysics

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Physics [physics] Physics [physics] Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00628176

Submitted on : Friday, September 30, 2011-3:43:05 PM

Last modification on : Tuesday, December 27, 2022-3:54:29 PM

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hal-00628176 , version 1 (30-09-2011)

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  • HAL Id : hal-00628176 , version 1

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Houda Sahaf, Frédéric Hamouda, Eric Moyen, Grégory Barbillon, Sylvain Held, et al.. Anodic Aluminum Oxide Replication for Soft UV-NIL Substrate Nanopatterning: Application in Biophysics. 8th International Symposium on Atomic Level Characterizations for New Materials and Devices (ALC'11), May 2011, Séoul, South Korea. ⟨hal-00628176⟩

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