Magnetron sputtered multilayer mirrors for x-rays and EUV

Franck Delmotte (1) , Fadi Choueikani (1) , Ahmed Ziani (1) , Charles Bourassin-Bouchet (1) , Evgueni Meltchakov (1) , Sébastien de Rossi (1) , Françoise Bridou (1) , Arnaud Jérôme (1) , Françoise Varniere (1)

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop

Domains: Optics [physics.optics]

Franck Delmotte, Fadi Choueikani, Ahmed Ziani, Charles Bourassin-Bouchet, Evgueni Meltchakov, et al.. Magnetron sputtered multilayer mirrors for x-rays and EUV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625022⟩