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Magnetron sputtered multilayer mirrors for x-rays and EUV

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Physics [physics] Physics [physics] Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00625022

Submitted on : Tuesday, September 20, 2011-2:14:35 PM

Last modification on : Friday, March 24, 2023-2:52:54 PM

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hal-00625022 , version 1 (20-09-2011)

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  • HAL Id : hal-00625022 , version 1

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Franck Delmotte, Fadi Choueikani, Ahmed Ziani, Charles Bourassin-Bouchet, Evgueni Meltchakov, et al.. Magnetron sputtered multilayer mirrors for x-rays and EUV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625022⟩

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