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Magnetron sputtered multilayer mirrors for x-rays and EUV

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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00625022
Contributor : Sébastien de Rossi <>
Submitted on : Tuesday, September 20, 2011 - 2:14:35 PM
Last modification on : Wednesday, September 16, 2020 - 5:43:32 PM

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  • HAL Id : hal-00625022, version 1

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Franck Delmotte, Fadi Choueikani, Ahmed Ziani, Charles Bourassin-Bouchet, Evgueni Meltchakov, et al.. Magnetron sputtered multilayer mirrors for x-rays and EUV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625022⟩

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