Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV - Institut d'Optique Graduate School
Conference Papers Year : 2011

Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV

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Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00625021

Submitted on : Tuesday, September 20, 2011-2:11:51 PM

Last modification on : Friday, March 24, 2023-2:52:54 PM

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hal-00625021 , version 1 (20-09-2011)

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  • HAL Id : hal-00625021 , version 1

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Ahmed Ziani, Franck Delmotte, Claire Le Paven-Thivet, Evgueni Meltchakov, Françoise Bridou, et al.. Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625021⟩

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SUPELEC IOGS UNIV-RENNES1 CNRS INSA-RENNES IETR PARISTECH LCFIO LCF_SCOP IETR_MF JYB-LAB UR1-MATH-STIC UNIV-PARIS-SACLAY UR1-UFR-ISTIC IETR-FUNMAT UNIV-RENNES INSA-GROUPE UR1-MATH-NUM GS-PHYSIQUE
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