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Conference Papers Year : 2011

Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV

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Dates and versions

hal-00625021 , version 1 (20-09-2011)

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  • HAL Id : hal-00625021 , version 1

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Ahmed Ziani, Franck Delmotte, Claire Le Paven-Thivet, Evgueni Meltchakov, Françoise Bridou, et al.. Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625021⟩
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