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Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV

Ahmed Ziani 1, 2 Franck Delmotte 2 Claire Le Paven-Thivet 3 Evgueni Meltchakov 2 Françoise Bridou 2 Arnaud Jérôme 2 Marc Roulliay 4 Karine Gasc 1 
1 CNES - Centre National d'Études Spatiales [Toulouse]
2 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
3 IETR - Institut d'Electronique et de Télécommunications de Rennes
4 ISMO - Institut des Sciences Moléculaires d'Orsay
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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00625021
Contributor : Sébastien de Rossi Connect in order to contact the contributor
Submitted on : Tuesday, September 20, 2011 - 2:11:51 PM
Last modification on : Saturday, June 25, 2022 - 10:59:49 AM

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  • HAL Id : hal-00625021, version 1

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SUPELEC | IOGS | UNIV-RENNES1 | CNRS | INSA-RENNES | IETR | PARISTECH | LCF_SCOP | IETR_MF | JYB-LAB | UR1-MATH-STIC | UR1-UFR-ISTIC | IETR-FUNMAT | UNIV-RENNES | INSA-GROUPE | UR1-MATH-NUM

Citation

Ahmed Ziani, Franck Delmotte, Claire Le Paven-Thivet, Evgueni Meltchakov, Françoise Bridou, et al.. Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625021⟩

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