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Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV

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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00625021
Contributor : Sébastien de Rossi <>
Submitted on : Tuesday, September 20, 2011 - 2:11:51 PM
Last modification on : Wednesday, September 16, 2020 - 5:40:30 PM

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  • HAL Id : hal-00625021, version 1

Citation

Ahmed Ziani, Franck Delmotte, Claire Le Paven-Thivet, Evgueni Meltchakov, Françoise Bridou, et al.. Multilayers systems-based aluminum synthesized by ion beam sputtering for extreme UV. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625021⟩

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