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Conference Papers Year : 2008

Broad Ion Beam Milling Techniques, Results and Prospects

Abstract

We have developed exotic versions of ion beam milling, using a broad beam. A mask modulates spatially the ion beam, allowing the generation of high precision and low roughness axisymmetrical and cylindrical surfaces.
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Dates and versions

hal-00577719 , version 1 (17-03-2011)

Identifiers

  • HAL Id : hal-00577719 , version 1

Cite

Raymond Mercier, Michel Mullot, Michel Lamare. Broad Ion Beam Milling Techniques, Results and Prospects. Optical Fabrication and Testing (OSA/OFT), Oct 2008, Rochester (NY), United States. pp.OThD1. ⟨hal-00577719⟩
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