Broad Ion Beam Milling Techniques, Results and Prospects

Raymond Mercier (1) , Michel Mullot (1) , Michel Lamare (1)

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop

We have developed exotic versions of ion beam milling, using a broad beam. A mask modulates spatially the ion beam, allowing the generation of high precision and low roughness axisymmetrical and cylindrical surfaces.

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]

Raymond Mercier, Michel Mullot, Michel Lamare. Broad Ion Beam Milling Techniques, Results and Prospects. Optical Fabrication and Testing (OSA/OFT), Oct 2008, Rochester (NY), United States. pp.OThD1. ⟨hal-00577719⟩