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Broad Ion Beam Milling Techniques, Results and Prospects

Raymond Mercier 1 Michel Mullot 1 Michel Lamare 1 
1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
Abstract : We have developed exotic versions of ion beam milling, using a broad beam. A mask modulates spatially the ion beam, allowing the generation of high precision and low roughness axisymmetrical and cylindrical surfaces.
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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00577719
Contributor : Raymond Mercier Connect in order to contact the contributor
Submitted on : Thursday, March 17, 2011 - 10:50:22 AM
Last modification on : Saturday, June 25, 2022 - 10:59:39 AM

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  • HAL Id : hal-00577719, version 1

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Raymond Mercier, Michel Mullot, Michel Lamare. Broad Ion Beam Milling Techniques, Results and Prospects. Optical Fabrication and Testing (OSA/OFT), Oct 2008, Rochester (NY), United States. pp.OThD1. ⟨hal-00577719⟩

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