Abstract : We have developed exotic versions of ion beam milling, using a broad beam. A mask modulates spatially the ion beam, allowing the generation of high precision and low roughness axisymmetrical and cylindrical surfaces.
https://hal-iogs.archives-ouvertes.fr/hal-00577719
Contributor : Raymond Mercier <>
Submitted on : Thursday, March 17, 2011 - 10:50:22 AM Last modification on : Wednesday, September 16, 2020 - 5:42:35 PM
Raymond Mercier, Michel Mullot, Michel Lamare. Broad Ion Beam Milling Techniques, Results and Prospects. Optical Fabrication and Testing (OSA/OFT), Oct 2008, Rochester (NY), United States. pp.OThD1. ⟨hal-00577719⟩