Effect of B4C diffusion barrier on the thermal behavior of Sc/Si multilayers - Institut d'Optique Graduate School
Conference Papers Year : 2008

Effect of B4C diffusion barrier on the thermal behavior of Sc/Si multilayers

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Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00575961

Submitted on : Friday, March 11, 2011-3:19:14 PM

Last modification on : Thursday, April 11, 2024-1:08:14 PM

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hal-00575961 , version 1 (11-03-2011)

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  • HAL Id : hal-00575961 , version 1

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Hélène Maury, Philippe Jonnard, Karine Le Guen, Jean-Michel André, Franck Delmotte, et al.. Effect of B4C diffusion barrier on the thermal behavior of Sc/Si multilayers. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575961⟩

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IOGS UPMC CNRS PARISTECH LCFIO LCF_SCOP LCPMR UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE SU-SCIENCES CHIMIE-SU
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