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Effect of B4C diffusion barrier on the thermal behavior of Sc/Si multilayers

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hal-00575961 , version 1 (11-03-2011)

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  • HAL Id : hal-00575961 , version 1

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Hélène Maury, Philippe Jonnard, Karine Le Guen, Jean-Michel André, Franck Delmotte, et al.. Effect of B4C diffusion barrier on the thermal behavior of Sc/Si multilayers. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575961⟩
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