Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer - Institut d'Optique Graduate School Access content directly
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hal-00575958 , version 1 (11-03-2011)

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  • HAL Id : hal-00575958 , version 1

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Franck Delmotte, Aurélie Hardouin, Marie-Françoise Ravet-Krill, Françoise Bridou, Jérôme Arnaud, et al.. Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer. The 9th International Conference 
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Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575958⟩
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