Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer

Franck Delmotte (1) , Aurélie Hardouin (1) , Marie-Françoise Ravet-Krill (1) , Françoise Bridou (1) , Jérôme Arnaud (1) , Françoise Varniere (1) , Sébastien Hedacq (2) , Benoît Albertin (2)

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
2 xenocs

Domains: Optics [physics.optics]

Franck Delmotte, Aurélie Hardouin, Marie-Françoise Ravet-Krill, Françoise Bridou, Jérôme Arnaud, et al.. Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575958⟩