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Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer

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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00575958
Contributor : Sébastien de Rossi <>
Submitted on : Friday, March 11, 2011 - 3:15:06 PM
Last modification on : Wednesday, September 16, 2020 - 5:43:28 PM

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  • HAL Id : hal-00575958, version 1

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Franck Delmotte, Aurélie Hardouin, Marie-Françoise Ravet-Krill, Françoise Bridou, Jérôme Arnaud, et al.. Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575958⟩

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