Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer - Institut d'Optique Graduate School Access content directly
Conference Papers Year :
Not file

Dates and versions

hal-00575958 , version 1 (11-03-2011)

Identifiers

  • HAL Id : hal-00575958 , version 1

Cite

Franck Delmotte, Aurélie Hardouin, Marie-Françoise Ravet-Krill, Françoise Bridou, Jérôme Arnaud, et al.. Improved spectral purity of EUV multilayer mirrors with optimized SiO2 top layer. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575958⟩
59 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More