Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet - Groupe XUV (Optique XUV et Surfaces Optiques) Access content directly
Journal Articles Thin Solid Films Year : 2021

Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet

Abstract

presents the structural characterization of Al/Sc-based periodic multilayer coatings for the extreme ultraviolet (EUV) spectral range. Based on transmission electron microscopy and electron diffraction as well as grazing-incidence and large-angle x-ray diffraction, a model for the layer structure and the interfacial effects of Al/Sc coatings is built. The onset of crystallization in nanoscale Al and Sc layers as a function of thickness is also revealed in these characterizations. The Al/Sc layer model is validated and further refined by fitting in-band and out-of-band EUV reflectance measurements across 5 orders of magnitude in an extended wavelength range from 17 to 80 nm. The same type of EUV reflectance measurements is used to test the Al/Sc aging properties and to demonstrate the spectral response of optimized two-and tri-material multilayers
Fichier principal
Vignette du fichier
Rebellato_TSF2021_Al-Sc.pdf (6.87 Mo) Télécharger le fichier
Origin : Publisher files allowed on an open archive

Dates and versions

hal-03970038 , version 1 (02-02-2023)

Identifiers

Cite

Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric M Gullikson, Sébastien de Rossi, et al.. Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet. Thin Solid Films, 2021, 735, ⟨10.1016/j.tsf.2021.138873⟩. ⟨hal-03970038⟩
27 View
13 Download

Altmetric

Share

Gmail Facebook X LinkedIn More