New method for the determination of photoabsorption from transmittance measurements in the extreme ultraviolet - Archive ouverte HAL Access content directly
Journal Articles Optics Express Year : 2022

New method for the determination of photoabsorption from transmittance measurements in the extreme ultraviolet

Franck Delmotte
Jennifer Alameda
  • Function : Author
Farhad Salmassi
  • Function : Author
Eric Gullikson
  • Function : Author
Regina Soufli
  • Function : Author

Abstract

We have developed a new method for the determination of photoabsorption at extreme ultraviolet wavelengths longer than 20 nm, where reliable refractive index values are sparse or non-existent. Our method overcomes the obstacle of multiple reflections that occur inside thin films in this spectral range, which up until now has prevented the accurate determination of photoabsorption from transmittance measurements. We have derived a mathematical expression that is independent of internal reflection amplitudes, while taking advantage of the transmittance oscillations stemming from such reflections. The method is validated on measurements of aluminum thin films. This advance will enable accurate refractive index values for many important materials for optical instrumentation, thus facilitating high-priority research on topics including coherent light sources, planetary and solar physics, and semiconductor manufacturing.
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Dates and versions

hal-03970030 , version 1 (02-02-2023)

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Franck Delmotte, Catherine Burcklen, Jennifer Alameda, Farhad Salmassi, Eric Gullikson, et al.. New method for the determination of photoabsorption from transmittance measurements in the extreme ultraviolet. Optics Express, 2022, 30, ⟨10.1364/oe.461333⟩. ⟨hal-03970030⟩
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