Comparison between theoretical and experimental scattering of an s-polarized electromagnetic wave by a two-dimensional obstacle on a surface

Abstract : The scattering of s-polarized electromagnetic waves by a two-dimensional scatterer upon a surface is considered. An integral approach previously reported is generalized in order to account for multilayer systems. In order to compare the theory with scattered-light measurements, we have fabricated two ribs upon a germanium substrate by means of a dry-etching technique. The height and width of the ribs are approximately 5 ,um. The ribs are separated by 15 Am, whereas the incident wavelength is 10.6 .tm. A good agreement is found between theory and experiment.