Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance - Archive ouverte HAL Access content directly
Journal Articles Journal of Applied Physics Year : 2016

Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

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Abstract

We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.

Dates and versions

hal-01323322 , version 1 (30-05-2016)

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Cite

C. Burcklen, R. Soufli, D. Dennetiere, F. Polack, B. Capitanio, et al.. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. Journal of Applied Physics, 2016, 119 (12), pp.125307 ⟨10.1063/1.4944723⟩. ⟨hal-01323322⟩
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