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Journal articles
Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance
C. Burcklen
1
R. Soufli
2
D. Dennetiere
3
F. Polack
3
B. Capitanio
3
E. Gullikson
4
E. Meltchakov
1
M. Thomasset
3
A. Jérome
1
S. de Rossi
1
Franck Delmotte
1
C. Burcklen 1
Author IdHAL : catherine-burcklen
R. Soufli 2
Author
D. Dennetiere 3
Author
F. Polack 3
Author
B. Capitanio 3
Author
E. Gullikson 4
Author
E. Meltchakov 1
Author IdHAL : evgueni-meltchakov ORCID : https://orcid.org/0000-0002-3344-5124
M. Thomasset 3
Author
1
Laboratoire Charles Fabry / Optique XUV (France)
- LCF - Laboratoire Charles Fabry (2 avenue Augustin Fresnel, 91127 Palaiseau Cedex - France)
- UP11 - Université Paris-Sud - Paris 11 (Bâtiment 300 - 91405 Orsay cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR8501 (France)
- IOGS - Institut d'Optique Graduate School (2 avenue Augustin Fresnel, 91127 Palaiseau Cedex - France)
2
LLNL - Lawrence Livermore National Laboratory (7000 East Avenue • Livermore, CA 94550 - United States)
3
SSOLEIL - Synchrotron SOLEIL (L'Orme des Merisiers Saint-Aubin - BP 48 91192 GIF-sur-YVETTE CEDEX - France)
- CNRS - Centre National de la Recherche Scientifique : UR1 (France)
4
CXRO - Center for X-Ray Optics [LBNL Berkeley] (Berkeley, California 94720 - United States)
- LBNL - Lawrence Berkeley National Laboratory [Berkeley] (1 Cyclotron Rd. MS 50A-1148, Berkeley, CA 94720 - United States)
Abstract : We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.
Document type :
Journal articles
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https://hal-iogs.archives-ouvertes.fr/hal-01323322
Contributor : Sébastien de Rossi <>
Submitted on : Monday, May 30, 2016 - 1:31:42 PM
Last modification on : Friday, July 2, 2021 - 3:45:29 AM
Contributor : Sébastien de Rossi <>
Submitted on : Monday, May 30, 2016 - 1:31:42 PM
Last modification on : Friday, July 2, 2021 - 3:45:29 AM
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- HAL Id : hal-01323322, version 1
- DOI : 10.1063/1.4944723
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Citation
C. Burcklen, R. Soufli, D. Dennetiere, F. Polack, B. Capitanio, et al.. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. Journal of Applied Physics, American Institute of Physics, 2016, 119 (12), pp.125307 ⟨10.1063/1.4944723⟩. ⟨hal-01323322⟩
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