Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

C. Burcklen 1 R. Soufli 2 D. Dennetiere 3 F. Polack 3 B. Capitanio 3 E. Gullikson 4 E. Meltchakov 1 M. Thomasset 3 A. Jérome 1 S. De Rossi 1 Franck Delmotte 1
1 Laboratoire Charles Fabry / XUV
LCF - Laboratoire Charles Fabry
2 LLNL - Lawrence Livermore National Laboratory
3 SSOLEIL - Synchrotron SOLEIL
4 CXRO - Center for X-Ray Optics
Abstract : We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B4C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B4C-on-Cr interface, which we modeled with a 1–1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr.
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Article dans une revue
Journal of Applied Physics, American Institute of Physics, 2016, 119 (12), pp.125307 〈10.1063/1.4944723〉
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https://hal-iogs.archives-ouvertes.fr/hal-01323322
Contributeur : Sébastien De Rossi <>
Soumis le : lundi 30 mai 2016 - 13:31:42
Dernière modification le : mercredi 31 janvier 2018 - 16:06:01

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IOGS | PARISTECH | LCF_XUV | LCFIO | UNIV-PARIS-SACLAY | SYNCHROTRON-SOLEIL

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C. Burcklen, R. Soufli, D. Dennetiere, F. Polack, B. Capitanio, et al.. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. Journal of Applied Physics, American Institute of Physics, 2016, 119 (12), pp.125307 〈10.1063/1.4944723〉. 〈hal-01323322〉

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