Raymond Mercier, Michel Mullot, Michel Lamare, Gérard Tissot. Ion beam milling fabrication of a small off-axis ellipsoidal mirror, diffraction limited to 1 μm resolution at 14 nm.
Review of Scientific Instruments, American Institute of Physics, 2001, 72 (2), pp.1559-1564.
⟨10.1063/1.1340562⟩.
⟨hal-00906408⟩