Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection

Abstract : We propose the use of binary slanted surface-relief gratings with parallel-groove walls as input and output couplers in a planar optical interconnect. Parametric optimization of cascaded output couplers is employed to design an interconnect consisting of N output couplers producing a uniform intensity distribution with a high efficiency that may be realized in one lithographic etching step. The sensitivity of a N = 4 interconnect to various fabrication errors is analyzed. We demonstrate the operation of a slanted surface-relief grating manufactured with electron-beam lithography and reactive-ion etching for an operating wavelength of λ = 0.633 μm.
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J. Michael Miller, Nicole de Beaucoudrey, Pierre Chavel, Jari Turunen, Edmond Cambril. Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection. Applied optics, Optical Society of America, 1997, 36 (23), pp.5717-5727. ⟨10.1364/AO.36.005717⟩. ⟨hal-00878957⟩

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