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Journal articles
Interferometric Characterization of Subwavelength Lamellar Gratings
Abstract : We propose a new, to our knowledge, method for determining the two main critical parameters of periodic one-dimensional lamellar structures, namely, linewidths and etched depths. The method is simple and requires only two measurements for the phase of the zero-transmitted order under two orthogonal polarizations. It is inspired by the analogy between subwavelength gratings and anisotropic homogeneous thin films. The method is tested with experimental data obtained with a Mach-Zehnder interferometer. Etched depths and linewidths derived from the interferograms and electromagnetic theory are compared with scanning-electron-microscope observations.
Cited literature [17 references]
https://hal-iogs.archives-ouvertes.fr/hal-00877945
Contributor : Fatima Pereira Connect in order to contact the contributor
Submitted on : Tuesday, October 29, 2013 - 2:16:48 PM
Last modification on : Friday, February 11, 2022 - 3:35:21 AM
Long-term archiving on: : Friday, April 7, 2017 - 6:02:57 PM
Contributor : Fatima Pereira Connect in order to contact the contributor
Submitted on : Tuesday, October 29, 2013 - 2:16:48 PM
Last modification on : Friday, February 11, 2022 - 3:35:21 AM
Long-term archiving on: : Friday, April 7, 2017 - 6:02:57 PM
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