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Interferometric Characterization of Subwavelength Lamellar Gratings

Abstract : We propose a new, to our knowledge, method for determining the two main critical parameters of periodic one-dimensional lamellar structures, namely, linewidths and etched depths. The method is simple and requires only two measurements for the phase of the zero-transmitted order under two orthogonal polarizations. It is inspired by the analogy between subwavelength gratings and anisotropic homogeneous thin films. The method is tested with experimental data obtained with a Mach-Zehnder interferometer. Etched depths and linewidths derived from the interferograms and electromagnetic theory are compared with scanning-electron-microscope observations.
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Philippe Lalanne, Pierre Pichon, Pierre Chavel, Edmond Cambril, Huguette Launois. Interferometric Characterization of Subwavelength Lamellar Gratings. Applied optics, Optical Society of America, 1999, 38 (23), pp.4980-4984. ⟨10.1364/AO.38.004980⟩. ⟨hal-00877945⟩

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