Skip to Main content Skip to Navigation
Journal articles

Interferometric Characterization of Subwavelength Lamellar Gratings

Abstract : We propose a new, to our knowledge, method for determining the two main critical parameters of periodic one-dimensional lamellar structures, namely, linewidths and etched depths. The method is simple and requires only two measurements for the phase of the zero-transmitted order under two orthogonal polarizations. It is inspired by the analogy between subwavelength gratings and anisotropic homogeneous thin films. The method is tested with experimental data obtained with a Mach-Zehnder interferometer. Etched depths and linewidths derived from the interferograms and electromagnetic theory are compared with scanning-electron-microscope observations.
Document type :
Journal articles
Complete list of metadata

Cited literature [17 references]  Display  Hide  Download
Contributor : Fatima Pereira Connect in order to contact the contributor
Submitted on : Tuesday, October 29, 2013 - 2:16:48 PM
Last modification on : Wednesday, July 6, 2022 - 10:42:20 AM
Long-term archiving on: : Friday, April 7, 2017 - 6:02:57 PM


Publisher files allowed on an open archive




Philippe Lalanne, Pierre Pichon, Pierre Chavel, Edmond Cambril, Huguette Launois. Interferometric Characterization of Subwavelength Lamellar Gratings. Applied optics, Optical Society of America, 1999, 38 (23), pp.4980-4984. ⟨10.1364/AO.38.004980⟩. ⟨hal-00877945⟩



Record views


Files downloads