Skip to Main content Skip to Navigation
Journal articles

Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1-xNb2O6)

Abstract : Excellent electro-optic properties of SrxBa1−xNb2O6 crystals (SBN:x) motivate the attempts to control the deposition of high ordered SBN thin films with the aim of optical waveguiding and processing integration. We have examined the ability of sputtering techniques to deposit stoichiometric SBN thin films. Composition analysis has enabled us to probe the mechanisms which control the target-film composition transfer and to define an experimental strategy for stoichiometry control. Epitaxial (001) SBN thin films have been obtained on MgO (100) substrates, which exhibit two in-plane orientations (±31°) mirror symmetric to the MgO cell axis.
Document type :
Journal articles
Complete list of metadatas

Cited literature [2 references]  Display  Hide  Download

https://hal-iogs.archives-ouvertes.fr/hal-00871187
Contributor : Fatima Pereira <>
Submitted on : Wednesday, October 9, 2013 - 9:02:26 AM
Last modification on : Wednesday, September 16, 2020 - 5:43:40 PM
Long-term archiving on: : Friday, April 7, 2017 - 8:34:56 AM

File

11_CuniotPonsard.pdf
Publisher files allowed on an open archive

Identifiers

Collections

Citation

Mireille Cuniot-Ponsard, Jean-Michel Desvignes, Buntha Ea-Kim, Eric Leroy. Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1-xNb2O6). Journal of Applied Physics, American Institute of Physics, 2003, 93 (3), pp.1718-1724. ⟨10.1063/1.1535749⟩. ⟨hal-00871187⟩

Share

Metrics

Record views

401

Files downloads

388