X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers

Fadi Choueikani 1 Françoise Bridou 1 B. Lagarde 2 Evgueni Meltchakov 1 François Polack 2 P. Mercere 2 Franck Delmotte 1
1 Laboratoire Charles Fabry / Optique XUV
LCF - Laboratoire Charles Fabry
2 SSOLEIL - Synchrotron SOLEIL
Abstract : We present a comparative study of B4C/Mo and B4C/Mo2C periodic multilayer structures deposited by magnetron sputtering. The characterization was performed by grazing incidence X-ray reflectometry at two different energies and high resolution transmission electron microscopy. The experimental results indicate the existence of an interdiffusion layer at the B4C-on-Mo interface in the B4C/Mo system. Thus, the B4C/Mo multilayers were modeled by an asymmetric structure with three layers in each period. The thickness of B4C-on-Mo interfacial layer was estimated about 1.1 nm. The B4C/Mo2C multilayers present less interdiffusion and are well modeled by a symmetric structure without interfacial layers. This study shows that B4C/Mo2C structure is an interesting alternative to B4C/Mo multilayer for X-ray optic applications.
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Journal articles
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https://hal-iogs.archives-ouvertes.fr/hal-00820770
Contributor : Franck Delmotte <>
Submitted on : Monday, May 6, 2013 - 3:55:10 PM
Last modification on : Monday, August 5, 2019 - 2:40:03 PM

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IOGS | PARISTECH | LCFIO | SYNCHROTRON-SOLEIL | LCF_XUV

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Fadi Choueikani, Françoise Bridou, B. Lagarde, Evgueni Meltchakov, François Polack, et al.. X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers. Applied physics. A, Materials science & processing, Springer Verlag, 2013, 111 (1), pp.191-198. ⟨10.1007/s00339-013-7560-3⟩. ⟨hal-00820770⟩

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