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Journal articles
X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers
Abstract : We present a comparative study of B4C/Mo and B4C/Mo2C periodic multilayer structures deposited by magnetron sputtering. The characterization was performed by grazing incidence X-ray reflectometry at two different energies and high resolution transmission electron microscopy. The experimental results indicate the existence of an interdiffusion layer at the B4C-on-Mo interface in the B4C/Mo system. Thus, the B4C/Mo multilayers were modeled by an asymmetric structure with three layers in each period. The thickness of B4C-on-Mo interfacial layer was estimated about 1.1 nm. The B4C/Mo2C multilayers present less interdiffusion and are well modeled by a symmetric structure without interfacial layers. This study shows that B4C/Mo2C structure is an interesting alternative to B4C/Mo multilayer for X-ray optic applications.
https://hal-iogs.archives-ouvertes.fr/hal-00820770
Contributor : Franck Delmotte <>
Submitted on : Monday, May 6, 2013 - 3:55:10 PM
Last modification on : Monday, August 5, 2019 - 2:40:03 PM
Contributor : Franck Delmotte <>
Submitted on : Monday, May 6, 2013 - 3:55:10 PM
Last modification on : Monday, August 5, 2019 - 2:40:03 PM
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