Skip to Main content Skip to Navigation
Conference papers

EUV near normal incidence collector development at SAGEM

Document type :
Conference papers
Complete list of metadatas

https://hal-iogs.archives-ouvertes.fr/hal-00814125
Contributor : Sébastien de Rossi <>
Submitted on : Tuesday, April 16, 2013 - 3:36:19 PM
Last modification on : Wednesday, September 16, 2020 - 5:42:22 PM

Identifiers

Collections

Citation

Renaud Mercier-Ythier, Xavier Bozec, Roland Geyl, André Rinchet, Christophe Hecquet, et al.. EUV near normal incidence collector development at SAGEM. Emerging lithographic technologies XII, Feb 2008, San José, United States. pp.692135, ⟨10.1117/12.787620⟩. ⟨hal-00814125⟩

Share

Metrics

Record views

468