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Conference Papers Year : 2008

EUV near normal incidence collector development at SAGEM

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Physics [physics] Physics [physics] Optics [physics.optics]

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Submitted on : Tuesday, April 16, 2013-3:36:19 PM

Last modification on : Tuesday, December 27, 2022-3:52:48 PM

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hal-00814125 , version 1 (16-04-2013)

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Renaud Mercier-Ythier, Xavier Bozec, Roland Geyl, André Rinchet, Christophe Hecquet, et al.. EUV near normal incidence collector development at SAGEM. Emerging lithographic technologies XII, Feb 2008, San José, United States. pp.692135, ⟨10.1117/12.787620⟩. ⟨hal-00814125⟩

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