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Conference papers

EUV near normal incidence collector development at SAGEM

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https://hal-iogs.archives-ouvertes.fr/hal-00814125
Contributor : Sébastien de Rossi Connect in order to contact the contributor
Submitted on : Tuesday, April 16, 2013 - 3:36:19 PM
Last modification on : Friday, September 10, 2021 - 1:52:06 PM

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Renaud Mercier-Ythier, Xavier Bozec, Roland Geyl, André Rinchet, Christophe Hecquet, et al.. EUV near normal incidence collector development at SAGEM. Emerging lithographic technologies XII, Feb 2008, San José, United States. pp.692135, ⟨10.1117/12.787620⟩. ⟨hal-00814125⟩

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