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Realization of nanostructures by soft UV nanoimprint lithography for biological applications

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hal-00627783 , version 1 (29-09-2011)

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  • HAL Id : hal-00627783 , version 1

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Grégory Barbillon, Frédéric Hamouda, Sylvain Held, Philippe Gogol, Simon Scheuring, et al.. Realization of nanostructures by soft UV nanoimprint lithography for biological applications. International Conference on Nanosystem Engineering and Biophotonics (NEBO09), Mar 2009, Cachan, France. ⟨hal-00627783⟩
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