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EUV reflectivity and stability of tri-component Al-based multilayers

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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00625019
Contributor : Sébastien de Rossi <>
Submitted on : Tuesday, September 20, 2011 - 2:08:25 PM
Last modification on : Wednesday, September 16, 2020 - 5:43:32 PM

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  • HAL Id : hal-00625019, version 1

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Evgueni Meltchakov, Ahmed Ziani, Sébastien de Rossi, Charles Bourassin-Bouchet, Françoise Bridou, et al.. EUV reflectivity and stability of tri-component Al-based multilayers. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625019⟩

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