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EUV reflectivity and stability of tri-component Al-based multilayers

Evgueni Meltchakov 1 Ahmed Ziani 1 Sébastien de Rossi 1 Charles Bourassin-Bouchet 1 Françoise Bridou 1 Arnaud Jérôme 1 Fadi Choueikani 1 Françoise Varniere 1 Frédéric Auchère 2 Xueyan Zhang 2 Marc Roulliay 3 Franck Delmotte 1 
1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
LCFIO - Laboratoire Charles Fabry de l'Institut d'Optique
2 IAS - Institut d'astrophysique spatiale
3 ISMO - Institut des Sciences Moléculaires d'Orsay
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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00625019
Contributor : Sébastien de Rossi Connect in order to contact the contributor
Submitted on : Tuesday, September 20, 2011 - 2:08:25 PM
Last modification on : Sunday, June 26, 2022 - 11:54:26 AM

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  • HAL Id : hal-00625019, version 1

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INSU | IOGS | CNRS | PARISTECH | LCF_SCOP | JYB-LAB

Citation

Evgueni Meltchakov, Ahmed Ziani, Sébastien de Rossi, Charles Bourassin-Bouchet, Françoise Bridou, et al.. EUV reflectivity and stability of tri-component Al-based multilayers. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625019⟩

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