EUV reflectivity and stability of tri-component Al-based multilayers

Evgueni Meltchakov (1) , Ahmed Ziani (1) , Sébastien de Rossi (1) , Charles Bourassin-Bouchet (1) , Françoise Bridou (1) , Arnaud Jérôme (1) , Fadi Choueikani (1) , Françoise Varniere (1) , Frédéric Auchère (2) , Xueyan Zhang (2) , Marc Roulliay (3) , Franck Delmotte (1)

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
2 IAS - Institut d'astrophysique spatiale
3 ISMO - Institut des Sciences Moléculaires d'Orsay

Domains: Optics [physics.optics]

Evgueni Meltchakov, Ahmed Ziani, Sébastien de Rossi, Charles Bourassin-Bouchet, Françoise Bridou, et al.. EUV reflectivity and stability of tri-component Al-based multilayers. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625019⟩