EUV reflectivity and stability of tri-component Al-based multilayers - Archive ouverte HAL Access content directly
Conference Papers Year : 2011

EUV reflectivity and stability of tri-component Al-based multilayers

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Physics [physics] Physics [physics] Optics [physics.optics]

Sébastien de Rossi  : Connect in order to contact the contributor

https://hal-iogs.archives-ouvertes.fr/hal-00625019

Submitted on : Tuesday, September 20, 2011-2:08:25 PM

Last modification on : Thursday, December 29, 2022-3:29:29 AM

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hal-00625019 , version 1 (20-09-2011)

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  • HAL Id : hal-00625019 , version 1

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Evgueni Meltchakov, Ahmed Ziani, Sébastien de Rossi, Charles Bourassin-Bouchet, Françoise Bridou, et al.. EUV reflectivity and stability of tri-component Al-based multilayers. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625019⟩

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