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Conference Papers Year : 2011

EUV reflectivity and stability of tri-component Al-based multilayers

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hal-00625019 , version 1 (20-09-2011)

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  • HAL Id : hal-00625019 , version 1

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Evgueni Meltchakov, Ahmed Ziani, Sébastien de Rossi, Charles Bourassin-Bouchet, Françoise Bridou, et al.. EUV reflectivity and stability of tri-component Al-based multilayers. Advances in Optical Thin Films IV, Sep 2011, Marseille, France. ⟨hal-00625019⟩
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