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STUDY OF Mo/B4C AND Mo2C/B4C MULTILAYER MIRRORS FOR THE ACHIEVEMENT OF ALTERNATE MUTLILAYER GRATINGS WITH HIGH EFFICIENCY IN THE 1-5 KeV ENERGY RANGE

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https://hal-iogs.archives-ouvertes.fr/hal-00600938
Contributor : Sébastien de Rossi <>
Submitted on : Thursday, June 16, 2011 - 11:17:36 AM
Last modification on : Wednesday, September 16, 2020 - 5:37:37 PM

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  • HAL Id : hal-00600938, version 1

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Fadi Choueikani, Franck Delmotte, Françoise Bridou, François Polack, Bruno Lagarde, et al.. STUDY OF Mo/B4C AND Mo2C/B4C MULTILAYER MIRRORS FOR THE ACHIEVEMENT OF ALTERNATE MUTLILAYER GRATINGS WITH HIGH EFFICIENCY IN THE 1-5 KeV ENERGY RANGE. French Symposium on Emerging Technologies for micro-nanofabrication, Nov 2011, Palaiseau, France. ⟨hal-00600938⟩

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