STUDY OF Mo/B4C AND Mo2C/B4C MULTILAYER MIRRORS FOR THE ACHIEVEMENT OF ALTERNATE MUTLILAYER GRATINGS WITH HIGH EFFICIENCY IN THE 1-5 KeV ENERGY RANGE - Archive ouverte HAL Access content directly
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STUDY OF Mo/B4C AND Mo2C/B4C MULTILAYER MIRRORS FOR THE ACHIEVEMENT OF ALTERNATE MUTLILAYER GRATINGS WITH HIGH EFFICIENCY IN THE 1-5 KeV ENERGY RANGE

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Physics [physics] Physics [physics] Optics [physics.optics]

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https://hal-iogs.archives-ouvertes.fr/hal-00600938

Submitted on : Thursday, June 16, 2011-11:17:36 AM

Last modification on : Wednesday, December 28, 2022-4:01:22 AM

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hal-00600938 , version 1 (16-06-2011)

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  • HAL Id : hal-00600938 , version 1

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Fadi Choueikani, Franck Delmotte, Françoise Bridou, François Polack, Bruno Lagarde, et al.. STUDY OF Mo/B4C AND Mo2C/B4C MULTILAYER MIRRORS FOR THE ACHIEVEMENT OF ALTERNATE MUTLILAYER GRATINGS WITH HIGH EFFICIENCY IN THE 1-5 KeV ENERGY RANGE. French Symposium on Emerging Technologies for micro-nanofabrication, Nov 2011, Palaiseau, France. ⟨hal-00600938⟩

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