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Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet

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hal-00575955 , version 1 (11-03-2011)

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  • HAL Id : hal-00575955 , version 1

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Sébastien de Rossi, Denis Joyeux, Pierre Chavel, Nelson de Oliveira, Marieke Richard, et al.. Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575955⟩
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