Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet

Sébastien de Rossi (1) , Denis Joyeux (1) , Pierre Chavel (1) , Nelson de Oliveira (2) , Marieke Richard (3) , Christophe Constancias (3) , Jean-Yves Robic (3)

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
2 SSOLEIL - Synchrotron SOLEIL
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]

Sébastien de Rossi, Denis Joyeux, Pierre Chavel, Nelson de Oliveira, Marieke Richard, et al.. Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575955⟩