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Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet

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Conference papers
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https://hal-iogs.archives-ouvertes.fr/hal-00575955
Contributor : Sébastien de Rossi <>
Submitted on : Friday, March 11, 2011 - 3:08:30 PM
Last modification on : Wednesday, September 16, 2020 - 5:42:39 PM

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  • HAL Id : hal-00575955, version 1

Citation

Sébastien de Rossi, Denis Joyeux, Pierre Chavel, Nelson de Oliveira, Marieke Richard, et al.. Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet. The 9th International Conference 
on the 
Physics of X-Ray Multilayer Structures, Feb 2008, Big Sky Resort, United States. ⟨hal-00575955⟩

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