Interface characteristics of Mo/Si and B4C/Mo/Si multilayers using non-destructive X-ray techniques

Hélène Maury (1) , Philippe Jonnard (1) , Jean-Michel André (1) , Julien Gautier (2) , Françoise Bridou (2) , Franck Delmotte (2) , Marie-Françoise Ravet-Krill (2)

1 LCPMR - Laboratoire de Chimie Physique - Matière et Rayonnement
2 Laboratoire Charles Fabry de l'Institut d'Optique / Scop

Domains: Optics [physics.optics]

Hélène Maury, Philippe Jonnard, Jean-Michel André, Julien Gautier, Françoise Bridou, et al.. Interface characteristics of Mo/Si and B4C/Mo/Si multilayers using non-destructive X-ray techniques. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2007, 601 (11), pp.2315-2322. ⟨hal-00575880⟩