Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet

Sébastien de Rossi (1) , Denis Joyeux (1) , Pierre Chavel (1) , Nelson de Oliveira (2) , Marieke Richard (3) , Jean-Yves Robic (3)

1 Laboratoire Charles Fabry de l'Institut d'Optique / Scop
2 SSOLEIL - Synchrotron SOLEIL
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

We use low coherence interferometry to investigate the depth structure of a complex multilayer stack reflector. The probing instrument is an interferometer based on a Fresnel's bi-mirror illuminated by relatively wide-band synchrotron undulator light near 13.5 nm. Simulations clearly confirm that our test object generates two back propagated signals that behave as if reflected on two effective planes. First results in this spectral range may open the way to a new physical approach to extreme ultraviolet sample characterization in the form of line-scan optical coherence tomography.

Domains: Physics [physics]; Physics [physics]; Optics [physics.optics]

Sébastien de Rossi, Denis Joyeux, Pierre Chavel, Nelson de Oliveira, Marieke Richard, et al.. Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet. Applied optics, 2008, 47 (12), pp.2109. ⟨hal-00557990⟩