An acoustic waveguide based on doubly-bonded silicon/PPT/silicon structures - Laboratoire Francis PERRIN (LFP) Access content directly
Conference Papers Year : 2009

An acoustic waveguide based on doubly-bonded silicon/PPT/silicon structures

Abstract

In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains in a lithium niobate plate bonded between two silicon wafers. The fabrication of the periodically poled transducers operating in the range 50-500 MHz has been achieved on a 3 inches 500 mum thick wafer. These devices then have been bonded on silicon wafers to fabricate a waveguide. Guided elliptic as well as partially guided longitudinal modes are excited. The experimental responses of the tested devices are compared to predicted harmonic admittances, showing a good agreement between both results and allowing for a reliable analysis of the nature of the excited modes. We also show interesting studies of material combinations used to guide ultrasonic waves. Dispersion properties have also been studied for a structure Si/PPT/Si.
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hal-00485716 , version 1 (19-04-2021)

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E. Courjon, F. Bassignot, G. Ulliac, Thierry Laroche, J. Garcia, et al.. An acoustic waveguide based on doubly-bonded silicon/PPT/silicon structures. 22nd IEEE International European Frequency and Time forum, Apr 2009, Besançon, France. pp.898-903, ⟨10.1109/FREQ.2009.5168317⟩. ⟨hal-00485716⟩
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