Efficient prototyping of large-scale pdms and silicon nanofluidic devices using pdms-based phase-shift lithography - LAAS-Nano Ingénierie et Intégration Access content directly
Journal Articles Microfluidics and Nanofluidics Year : 2012

Efficient prototyping of large-scale pdms and silicon nanofluidic devices using pdms-based phase-shift lithography

Abstract

In this study, we explore the potential of poly-dimethylsiloxane (PDMS)-based phase-shift lithography (PPSL) for the fabrication of nanofluidic devices. We establish that this technology, which was already shown to allow for the generation of 100 nm linear or punctual features over squared centimeter surfaces with conventional photolithography systems, is readily adequate to produce some of the most popular nanofluidic systems, namely nanochannels and nanoposts arrays. We also demonstrate that PPSL technology enables to generate PDMS and silicon nanofluidic systems. This technological achievement allows us to perform single DNA molecule manipulation experiments in PDMS and silicon nano-channels, and we observe an unexpectedly slow migration of DNA in PDMS devices, which is independent on salt or pH conditions. Our data in fact hint to the existence of an anomalous response of DNA in PDMS nanofluidic devices, which is likely associated to transient nonspecific interactions of DNA with PDMS walls. Overall, our work demonstrates the efficiency and the performances of PPSL for prototyping nanofluidic systems.
Fichier principal
Vignette du fichier
Article-Phaseshift-Version_11-08-08.pdf (664.14 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

hal-01682518 , version 1 (15-01-2018)

Identifiers

Cite

Yannick Viero, Qihao He, Laurent Mazenq, Hubert Ranchon, Jean-Yves Fourniols, et al.. Efficient prototyping of large-scale pdms and silicon nanofluidic devices using pdms-based phase-shift lithography. Microfluidics and Nanofluidics, 2012, 12 (1-4), pp.465 - 473. ⟨10.1007/s10404-011-0888-0⟩. ⟨hal-01682518⟩
143 View
258 Download

Altmetric

Share

Gmail Facebook X LinkedIn More