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High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing

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https://hal-iogs.archives-ouvertes.fr/hal-01349941
Contributor : Marie-Laure Edwards <>
Submitted on : Friday, July 29, 2016 - 2:07:48 PM
Last modification on : Wednesday, September 16, 2020 - 5:45:44 PM

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Mai Trang Do, Qinggele Li, Thi Thanh Ngan Nguyen, Henri Benisty, Isabelle Ledoux-Rak, et al.. High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing. Microsystem Technologies, Springer Verlag, 2014, 20 (10), pp.2097-2102. ⟨10.1007/s00542-014-2096-9⟩. ⟨hal-01349941⟩

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