Arsenin, Solutions of Ill-Posed Problems Winston, 1977. ,
Grating profile reconstruction by an inverse scattering method, Optics Communications, vol.35, issue.3, pp.299-302, 1980. ,
DOI : 10.1016/0030-4018(80)90038-3
Etch depth estimation of large-period silicon gratings with multivariate calibration of rigorously simulated diffraction profiles, Journal of the Optical Society of America A, vol.11, issue.9, pp.2485-2493, 1994. ,
DOI : 10.1364/JOSAA.11.002485
Diffraction analysis and experimental investigation of reflection-free holographic phase gratings, Pure and Applied Optics: Journal of the European Optical Society Part A, vol.2, issue.4, pp.299-314, 1993. ,
DOI : 10.1088/0963-9659/2/4/003
TECHNICAL NOTE Applications of the normal-incidence rotating-sample ellipsometer to high- and low-spatial-frequency gratings, Applied Optics, vol.35, issue.13, pp.2235-2238, 1996. ,
DOI : 10.1364/AO.35.002235
Angle-resolved polarimetric phase measurement for the characterization of gratings, Optics Letters, vol.21, issue.20, pp.1619-1621, 1996. ,
DOI : 10.1364/OL.21.001619
URL : https://hal.archives-ouvertes.fr/hal-01324206
Scatterometry and the simulation of diffraction based metrology, pp.5-16, 1993. ,
Use of light scattering in characterizing reactively ion etched profiles, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.9, issue.3, pp.664-668, 1991. ,
DOI : 10.1116/1.577386
Ultraviolet???visible ellipsometry for process control during the etching of submicrometer features, Journal of the Optical Society of America A, vol.12, issue.3, pp.591-599, 1995. ,
DOI : 10.1364/JOSAA.12.000591
Ellipsometric scatterometry for the metrology of sub-01-??m-linewidth structures, Applied Optics, vol.37, issue.22, pp.5112-5115, 1998. ,
DOI : 10.1364/AO.37.005112
Homogenization Techniques as Applied in the Electromagnetic Theory of Gratings, Electromagnetics, vol.2, issue.11, pp.17-36, 1985. ,
DOI : 10.1080/02726348508908135
Blazed-binary subwavelength gratings with efficiencies larger than those of conventional e ´chelette gratings, Opt. Lett, vol.23, pp.1081-1083, 1998. ,
Depth dependence of the effective properties of subwavelength gratings, J. Opt. Soc. Am. A, vol.14, pp.450-458, 1997. ,
A transmission polarizing beam splitter grating, J. Opt. A: Pure Appl. Opt, vol.1, pp.215-219, 1999. ,
Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings, Journal of the Optical Society of America A, vol.12, issue.5, pp.1068-1076, 1995. ,
DOI : 10.1364/JOSAA.12.001068
Highly improved convergence of the coupled-wave method for TM polarization, J. Opt. Soc. Am. A, vol.13, pp.779-784, 1996. ,
Experimental verification of super resolution in nonlinear inverse scattering, Applied Physics Letters, vol.72, issue.23, pp.3080-3082, 1998. ,
DOI : 10.1063/1.121547