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Micro patterning of complex Waveguide Resonant Gratings (WRG)

Abstract : This PhD thesis entitled “Micro patterning of complex Waveguide Resonant Gratings (WRG)” studies the optical sensing devices, which involve various photolithography techniques and nanotechnology tools with clean room processes for their fabrication. These devices, in their classic form, consist of a diffraction grating formed by microscopic lines engraved periodically on a photosensitive surface, which is deposited on a dielectric layer, the waveguide. Both layers are supported on a substrate. To enable sensing functions, the diffraction grating must be extremely selective, i.e. it must have the ability to reject all the received spectral components, while selecting only one wavelength to couple it into the waveguide. After the out coupling, a reflection with a very large amplitude and great finesse occurs. Different types of components depending on the intended application can be produced on different types of substrates, materials or geometries (plane, cylindrical).One of the projects of this thesis engineers WRG on the interior walls of a tube to couple TE and TM modes into the waveguide. The fabrication is achieved by a specially designed radial phase mask, whereas the optical function is highlighted by the use of a conical mirror, able to reflect light isotropically for mode excitation. In addition, innovative materials can be used for their integration into flat WRG. One of the materials under study is the Vanadium Dioxide (VO2), which undergoes first-order phase transitions (Insulator to Metal) at low and high temperatures respectively. The fabrication of such a delicate compound is completed by two different synthesis methods, the Pulsed Laser Deposition and Magnetron Sputtering. The ability to induce resonance by thermally triggering the device is intended for laser safety applications to avoid damage during overheating.
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Submitted on : Saturday, April 24, 2021 - 4:54:08 PM
Last modification on : Monday, April 26, 2021 - 3:08:41 AM
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  • HAL Id : tel-03207382, version 1


Erieta-Katerina Koussi. Micro patterning of complex Waveguide Resonant Gratings (WRG). Optics / Photonic. Université de Lyon, 2020. English. ⟨NNT : 2020LYSES027⟩. ⟨tel-03207382⟩



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