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Basse température Flexible electronics Sensitivity Nanofils de silicium Microcapteurs Sensor Chemical sensor Inkjet printing TFT Microcrystalline silicon Nanowires Méthode des espaceurs Thermos-responsive surfactant system Polymers Deep UV polymer Silicium Polycrystalline silicon Stretchable electronics Photonic Plasma etching Microelectronics Flexible substrate Diazonium salts Low temperature electronics Sphingomyelin lipids Organic electronic devices Organic field effect transistor Spacer method Synthesis TLM Photoluminescence Reproducibilities Integrated photonics Resistors Field effect transistors PH LPCVD Copper Photodetector Mid-IR Functionalization Thin films Silicium microcristallin CMOS compatible Gas sensor Carbon nanotubes Active layer Micro-resonators Deformation Couches minces Microfluidic Electrical stability Chalcogenide Organic field effect transistors Density of states Chemical sensors Titanium nitride Nanofils Thin film transistors Silicon nanowires Μ-Si doped Doping Silicon Nanoribbons Thin film circuits Fonctionnalisation de surface In-situ doping Temperature Microcapteur Thin Film Transistors CMOS integrated circuits Procédé SLS Strain gauge Electrodes Low temperature Chemical detection Microsensors Microfluidique Organic semiconductors Sphingomyelin Stabilité électrique Low-frequency noise Sensors Resistor Low-cost silicon nanowires devices Polycrystalline materials Infrared Electrical performance Photonics PECVD Organic electronics Gel/fluid phase transition Low temperatures Amorphous materials Polysilicon SLS process Thin film Fatty acid Polymer ICP-CVD